Load-lock chamber
USD556157S1 · kind S1 · design
6Cited by
3References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2004 |
| Grant date | Nov 27, 2007 |
| Priority date | — |
| Expiry date | Nov 27, 2021 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.