Attracting plate of an electrostatic chuck for semiconductor manufacturing
USD587222S1 · kind S1 · design
48Cited by
9References
1Claims
0Family size
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Key dates
| Filing date | Feb 1, 2007 |
| Grant date | Feb 24, 2009 |
| Priority date | — |
| Expiry date | Feb 24, 2023 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.