Top panel for microwave introduction window of a plasma processing apparatus
USD594485S1 · kind S1 · design
3Cited by
24References
1Claims
0Family size
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Key dates
| Filing date | Jan 30, 2006 |
| Grant date | Jun 16, 2009 |
| Priority date | — |
| Expiry date | Jun 16, 2023 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.