Process tube for manufacturing semiconductor wafers
USD594488S1 · kind S1 · design
18Cited by
15References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2007 |
| Grant date | Jun 16, 2009 |
| Priority date | — |
| Expiry date | Jun 16, 2023 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.