Heater block for use in a semiconductor processing tool
USD643055S1 · kind S1 · design
508Cited by
5References
1Claims
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Key dates
| Filing date | Sep 11, 2008 |
| Grant date | Aug 9, 2011 |
| Priority date | — |
| Expiry date | Aug 9, 2025 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.