Dielectric window for plasma processing device
USD645486S1 · kind S1 · design
6Cited by
3References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2010 |
| Grant date | Sep 20, 2011 |
| Priority date | — |
| Expiry date | Sep 20, 2025 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.