Deposition chamber cover ring
USD665491S1 · kind S1 · design
110Cited by
23References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2012 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Aug 14, 2026 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.