Wafer holding member
USD674366S1 · kind S1 · design
14Cited by
17References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 24, 2011 |
| Grant date | Jan 15, 2013 |
| Priority date | — |
| Expiry date | Jan 15, 2027 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.