Baffle plate for manufacturing semiconductor
USD694791S1 · kind S1 · design
12Cited by
7References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2012 |
| Grant date | Dec 3, 2013 |
| Priority date | — |
| Expiry date | Dec 3, 2027 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.