Electrostatic chuck
USD708651S1 · kind S1 · design
10Cited by
17References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2011 |
| Grant date | Jul 8, 2014 |
| Priority date | — |
| Expiry date | Jul 8, 2028 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.