Wafer support ring
USD783922S1 · kind S1 · design
37Cited by
11References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 8, 2014 |
| Grant date | Apr 11, 2017 |
| Priority date | — |
| Expiry date | Apr 11, 2031 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.