Substrate supporting arm for semiconductor manufacturing apparatus
USD785578S1 · kind S1 · design
10Cited by
15References
1Claims
0Family size
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Key dates
| Filing date | Mar 22, 2016 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | May 2, 2032 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.