Showerhead for a semiconductor processing chamber
USD790039S1 · kind S1 · design
23Cited by
17References
1Claims
0Family size
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Key dates
| Filing date | Apr 8, 2016 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Jun 20, 2032 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.