Target profile for a physical vapor deposition chamber target
USD798248S1 · kind S1 · design
291Cited by
11References
1Claims
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Key dates
| Filing date | Jun 18, 2015 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Sep 26, 2032 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.