Target profile for a physical vapor deposition chamber target
USD836572S1 · kind S1 · design
27Cited by
19References
1Claims
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Key dates
| Filing date | Sep 30, 2016 |
| Grant date | Dec 25, 2018 |
| Priority date | — |
| Expiry date | Dec 25, 2033 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.