Cover ring for a plasma processing apparatus
USD840365S1 · kind S1 · design
18Cited by
15References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 18, 2017 |
| Grant date | Feb 12, 2019 |
| Priority date | — |
| Expiry date | Feb 12, 2034 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.