Patent · US Active

Sealing material ring for a semiconductor manufacturing apparatus

USD862404S1 · kind S1 · design

30Cited by
14References
1Claims
0Family size

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Key dates

Filing dateApr 19, 2017
Grant dateOct 8, 2019
Priority date
Expiry dateOct 8, 2034

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.