Shinya Morita
98Patents
14h-index
133Co-inventors
87Inventor score
Filing activity: Jan 27, 1992 → Mar 17, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8529701B2 | Substrate processing apparatus | Chemistry; Metallurgy | 447 | Active |
| US9111972B2 | Substrate processing apparatus and manufacturing method for a semiconductor device | Electricity | 426 | Active |
| US8264291B2 | Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same | Emerging Cross-Sectional Technologies | 268 | Active |
| US6537138B2 | Method of grinding an axially asymmetric aspherical mirror | Performing Operations; Transporting | 95 | Expired |
| USD725055S1 | Reaction tube | General | 36 | Active |
| US7106528B2 | Method and apparatus for manufacturing large double-sided curved Fresnel lens | Performing Operations; Transporting | 36 | Expired |
| USD739832S1 | Reaction tube | General | 34 | Active |
| USD862404S1 | Sealing material ring for a semiconductor manufacturing apparatus | General | 30 | Active |
| USD711843S1 | Reaction tube | General | 30 | Active |
| US6251189A | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 22 | Expired |
| USD719114S1 | Reaction tube | General | 19 | Active |
| US8535997B2 | Wiring structure, thin film transistor substrate, method for manufacturing thin film transistor substrate, and display device | Electricity | 19 | Active |
| US6539642B1 | Probe type shape measuring sensor, and NC processing equipment and shape measuring method using the sensor | Physics | 15 | Expired |
| USD720707S1 | Reaction tube | General | 14 | Active |
| US7685733B2 | Micro force measurement device, micro force measurement method, and micro surface shape measurement probe | Physics | 14 | Active |
| US9184298B2 | Interconnect structure and sputtering target | Electricity | 12 | Active |
| US5969897A | Data recording apparatus and method | Physics | 12 | Expired |
| US9553201B2 | Thin film transistor, thin film transistor array panel, and manufacturing method of thin film transistor | Electricity | 9 | Active |
| US8851886B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 9 | Active |
| US5469563A | Method and control apparatus for self diagnosis | Physics | 9 | Expired |
| US8043431B2 | Substrate processing apparatus and method for manufacturing a semiconductor device | Chemistry; Metallurgy | 8 | Active |
| USD773609S1 | Return nozzle | General | 8 | Active |
| USD771772S1 | Return nozzle | General | 8 | Active |
| US8057599B2 | Substrate processing apparatus and method for manufacturing a semiconductor device | Chemistry; Metallurgy | 8 | Expired |
| US5612827A | Data recorder having self-diagnostic function using magnetic tape | Physics | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.