Patent · US Active

Electrode plate for a plasma processing apparatus

USD868993S1 · kind S1 · design

32Cited by
15References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 30, 2018
Grant dateDec 3, 2019
Priority date
Expiry dateDec 3, 2034

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.