Gas supply plate for semiconductor manufacturing apparatus
USD880437S1 · kind S1 · design
351Cited by
1,255References
1Claims
0Family size
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Key dates
| Filing date | May 3, 2018 |
| Grant date | Apr 7, 2020 |
| Priority date | — |
| Expiry date | Apr 7, 2035 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.