Ion shield plate for semiconductor manufacturing apparatus
USD900760S1 · kind S1 · design
22Cited by
48References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2019 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Nov 3, 2035 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.