Patent · US Active

Integrated type ion shield for semiconductor manufacturing apparatus

USD901407S1 · kind S1 · design

8Cited by
48References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 23, 2019
Grant dateNov 10, 2020
Priority date—
Expiry dateNov 10, 2035

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.