Gas supply plate for semiconductor manufacturing apparatus
USD913980S1 · kind S1 · design
309Cited by
1,735References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2020 |
| Grant date | Mar 23, 2021 |
| Priority date | — |
| Expiry date | Mar 23, 2036 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.