Grounded electrode for a plasma processing apparatus
USD916038S1 · kind S1 · design
5Cited by
11References
1Claims
0Family size
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Key dates
| Filing date | Sep 18, 2019 |
| Grant date | Apr 13, 2021 |
| Priority date | — |
| Expiry date | Apr 13, 2036 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.