Patent · US Active

Target profile for a physical vapor deposition chamber target

USD966357S1 · kind S1 · design

16Cited by
105References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 31, 2021
Grant dateOct 11, 2022
Priority date
Expiry dateOct 11, 2037

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.