Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems
USRE33836E · kind E · reissue
Assignee
Inventors
Key dates
| Filing date | Aug 24, 1990 |
| Grant date | Mar 3, 1992 |
| Priority date | — |
| Expiry date | Aug 24, 2010 |
Classification
- Technology area (CPC —)General
Abstract
Apparatus for projecting multiple images from a pair of reticles (117) to a photo-sensitive coated substrate (1) to produce large scale electronic devices (2). A pair of parallel and proximate optical systems (29) are used, the optical systems being positioned to project in the z-direction upon a movable stage (11) subject to controlled motion (159, 169) in the x- and y-directions. The apparatus includes means (225) for determining the coordinates of motion of the stage relative to images projected from the reticles, means for using the determined positions to establish a stage transfer function for the apparatus relative to various positions of stage, and means (130) for applying the transfer function to adjust the relative positions of the reticles (117) and substrate (1) for accurate image projection, and for thereafter projecting an image upon the substrate. The stage is then stepped to a position to permit projection of an abutting image, and the transfer function is used to adjust the relative positions of the reticles (117) and substrate (1) for accurate image projection for projecting the abutting image upon the substrate (1). The steps are repeated until sufficient images …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.