Laser for generating narrow-band radiation

USRE38039E1 · kind E1 · reissue

Assignee

• Lambda Physik AG · DE

Inventors

• Jürgen Kleinschmidt · Hersbruck, DE
• Peter Heist · Jena, DE

Key dates

• Filing date: Jun 1, 2000
• Grant date: Mar 18, 2003
• Expiry date: Jun 1, 2020

Classification

• Technology area (CPC —): General

Abstract

A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle &ggr;a,&ggr;b) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.