Object observation apparatus and object observation
USRE40221E1 · kind E1 · reissue
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2004 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | Nov 12, 2024 |
Classification
- Technology area (CPC —)General
Abstract
This invention relates to an object observation apparatus and observation method. The object observation apparatus is characterized by including a drivable stage on which a sample is placed, an irradiation optical system which is arranged to face the sample on the stage, and emits an electron beam as a secondary beam, an electron detection device which is arranged to face the sample, causes to project, as a primary beam, at least one of a secondary electron, reflected electron, and back-scattering electron generated by the sample upon irradiation of the electron beam, and generates image information of the sample, a stage driving device which is adjacent to the stage to drive the stage, and a deflector arranged between the sample and the electron detection device to deflect the secondary beam, the electron detection device having a converter arranged on a detection surface to convert the secondary beam into light, an array image sensing unit which is adjacent to the converter, has pixels of a plurality of lines each including a plurality of pixels on the detection surface, sequentially transfers charges of pixels of each line generated upon reception of light of an optical image ob…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.