Capping layer for EUV optical elements
USRE42338E1 · kind E1 · reissue
4Cited by
19References
64Claims
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Key dates
| Filing date | Mar 28, 2006 |
| Grant date | May 10, 2011 |
| Priority date | — |
| Expiry date | Mar 28, 2026 |
Classification
- Technology area (CPC —)General
Abstract
Optical elements such as multilayered EUV mirrors are provided with protective capping layers of diamond-like carbon (C), boron nitride (BN), boron carbide (B4C), silicon nitride (Si3N4), silicon carbide (SiC), B, Pd, Ru, Rh, Au, MgF2, LiF, C2F4 and TiN and compounds and alloys thereof. The final period of a multilayer coating may also be modified to provide improved protective characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.