Filters employing both acidic polymers and physical-adsorption media

USRE44536E1 · kind E1 · reissue

Assignee

• ENTEGRIS, INC. · US

Inventors

• Oleg P. Kishkovich · Greenville, US
• Devon Kinkead · Cumberland, US
• Anatoly Grayfer · Newton, US
• William Goodwin · Medway, US
• David Ruede · Northbridge, US

Key dates

• Filing date: Jun 1, 2011
• Grant date: Oct 15, 2013
• Expiry date: Jun 1, 2031

Classification

• Technology area (CPC —): General

Abstract

A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.