Patent assignee · US · COMPANY

AG Associates

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6Patents
0Active
6Granted
30Portfolio score

Filing activity: Dec 20, 1996 → May 14, 1998

Most-cited patents

PatentTitleAreaCited byStatus
US5960158A Apparatus and method for filtering light in a thermal processing chamber Physics 64 Expired
US5930456A Heating device for semiconductor wafers Electricity 52 Expired
US5874711A Apparatus and method for determining the temperature of a radiating surface Physics 50 Expired
US5970214A Heating device for semiconductor wafers Chemistry; Metallurgy 43 Expired
US5820942A Process for depositing a material on a substrate using light energy Electricity 35 Expired
US5970382A Process for forming coatings on semiconductor devices Electricity 29 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.