Patent assignee · US · COMPANY

Aspect Systems, Inc.

2Patents
0Active
2Granted
23Portfolio score

Filing activity: Feb 17, 1995 → Feb 18, 1997

Most-cited patents

PatentTitleAreaCited byStatus
US5868852A Partial clean fluorine thermal cleaning process Chemistry; Metallurgy 9 Expired
US5714011A Diluted nitrogen trifluoride thermal cleaning process Emerging Cross-Sectional Technologies 3 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.