AST Elekronik GmbH
3Patents
0Active
3Granted
29Portfolio score
Filing activity: Jul 14, 1992 → Mar 28, 1995
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5628564A | Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems | Physics | 73 | Expired |
| US5359693A | Method and apparatus for a rapid thermal processing of delicate components | Electricity | 31 | Expired |
| US5580830A | Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus | Emerging Cross-Sectional Technologies | 7 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.