EcoPhysics AG
2Patents
0Active
2Granted
23Portfolio score
Filing activity: Aug 4, 1998 → Jun 27, 2002
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6899784B1 | Apparatus for detecting CMP endpoint in acidic slurries | Electricity | 6 | Expired |
| US6506341B2 | Chemiluminescence detection apparatus | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.