Patent assignee · CH · COMPANY

EcoPhysics AG

2Patents
0Active
2Granted
23Portfolio score

Filing activity: Aug 4, 1998 → Jun 27, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6899784B1 Apparatus for detecting CMP endpoint in acidic slurries Electricity 6 Expired
US6506341B2 Chemiluminescence detection apparatus Emerging Cross-Sectional Technologies 2 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.