Chemiluminescence detection apparatus
US6506341B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 4, 1998 |
| Grant date | Jan 14, 2003 |
| Priority date | — |
| Expiry date | Aug 4, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/175383
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is described for detecting the presence of a gaseous chemical produced during a chemical-mechanical polishing operation. The apparatus includes a catalytic converter, a reaction chamber and a light sensor. The catalytic converter, heated to about 800° C. converts the chemical to a different chemical product. The reaction chamber produces an excited species; the pressure in the reaction chamber is maintained sufficiently low to substantially avoid collisional deactivation of the excited species, so as to permit real-time detection of the chemical. A light signal from the excited species is input to the light sensor. An output from the light sensor corresponds to the real-time detection of the chemical, thereby permitting real-time control of the chemical-mechanical polishing operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.