Excimer Laser Systems
4Patents
0Active
4Granted
30Portfolio score
Filing activity: Oct 4, 1994 → Apr 16, 1998
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6032997A | Vacuum chuck | Emerging Cross-Sectional Technologies | 91 | Expired |
| US5559338A | Deep ultraviolet optical imaging system for microlithography and/or microfabrication | Physics | 83 | Expired |
| US5488229A | Deep ultraviolet microlithography system | Physics | 74 | Expired |
| US5771260A | Enclosure system for laser optical systems and devices | Electricity | 22 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.