Patent assignee · CN · COMPANY

Hwatsing Technology Co., Ltd.

4Patents
4Active
4Granted
50Portfolio score

Filing activity: Jun 8, 2011 → Jun 28, 2024

Most-cited patents

PatentTitleAreaCited byStatus
US9138857B2 Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same Performing Operations; Transporting 5 Active
US10857646B2 Apparatus for chemical-mechanical polishing Performing Operations; Transporting 0 Active
US12151335B1 Monitoring method for chemical mechanical polishing and chemical mechanical polishing device Performing Operations; Transporting 0 Active
US9255780B2 Method for measuring thickness of film on wafer edge Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.