Patent assignee · US · COMPANY

Inficon Leybold-Heraeus

9Patents
0Active
9Granted
28Portfolio score

Filing activity: Jan 30, 1976 → May 27, 1986

Most-cited patents

PatentTitleAreaCited byStatus
US4036167A Apparatus for monitoring vacuum deposition processes Chemistry; Metallurgy 20 Expired
US4221964A Control system for mass spectrometer Electricity 16 Expired
US4672203A Two stage valve for use in pressure converter Emerging Cross-Sectional Technologies 15 Expired
US4164861A Leak standard generator Physics 12 Expired
US4381894A Deposition monitor and control system Chemistry; Metallurgy 12 Expired
US4171341A Solid state sensor Physics 11 Expired
US4692630A Wavelength specific detection system for measuring the partial pressure of a gas excited by an electron beam Physics 9 Expired
US4335961A Refractive index measurement of optical thin-film Physics 6 Expired
US4203199A Solid state sensor Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.