Inspex Incorporated
12Patents
0Active
12Granted
31Portfolio score
Filing activity: Oct 23, 1986 → Dec 13, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4772126A | Particle detection method and apparatus | Physics | 55 | Expired |
| US5805278A | Particle detection method and apparatus | Physics | 53 | Expired |
| US5317380A | Particle detection method and apparatus | Physics | 52 | Expired |
| US4895446A | Particle detection method and apparatus | Physics | 38 | Expired |
| US5659390A | Method and apparatus for detecting particles on a surface of a semiconductor wafer having repetitive patterns | Physics | 35 | Expired |
| US6774991B1 | Method and apparatus for inspecting a patterned semiconductor wafer | Physics | 28 | Expired |
| US6621570B1 | Method and apparatus for inspecting a patterned semiconductor wafer | Physics | 28 | Expired |
| US6028664A | Method and system for establishing a common reference point on a semiconductor wafer inspected by two or more scanning mechanisms | Physics | 27 | Expired |
| US6097428A | Method and apparatus for inspecting a semiconductor wafer using a dynamic threshold | Physics | 17 | Expired |
| US5667353A | Robot system | Performing Operations; Transporting | 14 | Expired |
| US5742422A | Adjustable fourier mask | Physics | 12 | Expired |
| US6643006B1 | Method and system for reviewing a semiconductor wafer using at least one defect sampling condition | Physics | 8 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.