Patent assignee · US · COMPANY

Inspex Incorporated

12Patents
0Active
12Granted
31Portfolio score

Filing activity: Oct 23, 1986 → Dec 13, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US4772126A Particle detection method and apparatus Physics 55 Expired
US5805278A Particle detection method and apparatus Physics 53 Expired
US5317380A Particle detection method and apparatus Physics 52 Expired
US4895446A Particle detection method and apparatus Physics 38 Expired
US5659390A Method and apparatus for detecting particles on a surface of a semiconductor wafer having repetitive patterns Physics 35 Expired
US6774991B1 Method and apparatus for inspecting a patterned semiconductor wafer Physics 28 Expired
US6621570B1 Method and apparatus for inspecting a patterned semiconductor wafer Physics 28 Expired
US6028664A Method and system for establishing a common reference point on a semiconductor wafer inspected by two or more scanning mechanisms Physics 27 Expired
US6097428A Method and apparatus for inspecting a semiconductor wafer using a dynamic threshold Physics 17 Expired
US5667353A Robot system Performing Operations; Transporting 14 Expired
US5742422A Adjustable fourier mask Physics 12 Expired
US6643006B1 Method and system for reviewing a semiconductor wafer using at least one defect sampling condition Physics 8 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.