Batch fabricated semiconductor micro-switch
US5821596A · kind A · utility
99Cited by
1References
25Claims
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Assignee
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Key dates
| Filing date | Mar 24, 1997 |
| Grant date | Oct 13, 1998 |
| Priority date | — |
| Expiry date | Mar 24, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-switch having a flexible conductive membrane which is moved by an external force, such as pressure from an air flow, to establish a connection between contact pads. The conductive membrane is stretched over one or more spacer pads to introduce deformation in the conductive membrane, thereby improving the accuracy and repeatability of the micro-switch. The spacing between the contact pads and the conductive membrane is precisely controlled by controlling the height difference between the spacer pads and the conductive pads. This height difference is determined by one or more precisely controlled etch operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.