Patent assignee · JP · COMPANY

KATAGIRI ENGINEERING CO., LTD.

6Patents
5Active
6Granted
39Portfolio score

Filing activity: May 28, 2004 → Aug 19, 2016 · 3 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7632379B2 Plasma source and plasma processing apparatus Electricity 17 Expired
US9447518B2 Radical generator and molecular beam epitaxy apparatus Electricity 1 Active
US10577719B2 Radical generator and molecular beam epitaxy apparatus Electricity 0 Active
US8310673B2 Light source Physics 0 Active
US7782463B2 Particle density measuring probe and particle density measuring equipment Physics 0 Active
US8638034B2 Multi-micro hollow cathode light source and atomic absorption sepctrometer Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.