Patent assignee · KR · COMPANY

LTCAM CO., LTD.

6Patents
6Active
6Granted
43Portfolio score

Filing activity: Apr 29, 2014 → May 29, 2019

Most-cited patents

PatentTitleAreaCited byStatus
US9340759B2 Cleaning composition and method of manufacturing metal wiring using the same Electricity 5 Active
US10689572B2 Etchant composition with high selectivity to silicon nitride Chemistry; Metallurgy 0 Active
US9902925B2 Cleaner composition for process of manufacturing semiconductor and display Chemistry; Metallurgy 0 Active
US9873857B2 Cleaning composition Chemistry; Metallurgy 0 Active
US10995268B2 Etching composition effective to selectively wet etch a silicon nitride film Chemistry; Metallurgy 0 Active
US9869027B2 Cleaning composition and method of manufacturing metal wiring using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.