Mattson Technologies, Inc.
2Patents
0Active
2Granted
27Portfolio score
Filing activity: Dec 10, 1998 → Sep 3, 1999
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6207583A | Photoresist ashing process for organic and inorganic polymer dielectric materials | Physics | 45 | Expired |
| US6310328A | Rapid thermal processing chamber for processing multiple wafers | Electricity | 41 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.