Patent assignee · TW · COMPANY

Memsmart Semiconductor Corp.

4Patents
4Active
4Granted
39Portfolio score

Filing activity: Aug 27, 2007 → Oct 2, 2008 · 4 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7863063B2 Method for fabricating a sealed cavity microstructure Performing Operations; Transporting 4 Active
US7666702B2 Method for fabricating a microstructure Performing Operations; Transporting 3 Active
US7829364B2 Method of fabricating a suspension microstructure Performing Operations; Transporting 0 Active
US7935556B2 Microelectromechanical system and process of making the same Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.