Patent assignee · US · COMPANY

Micro Materials Inc.

3Patents
3Active
3Granted
42Portfolio score

Filing activity: Jul 11, 2015 → Sep 28, 2016

Most-cited patents

PatentTitleAreaCited byStatus
US9962919B2 Method of separating a carrier-workpiece bonded stack Emerging Cross-Sectional Technologies 3 Active
US9991150B2 Procedure of processing a workpiece and an apparatus designed for the procedure Emerging Cross-Sectional Technologies 1 Active
US11097306B2 Support for bonding a workpiece and method thereof Emerging Cross-Sectional Technologies 1 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.