Multibeam Systems Inc.
15Patents
3Active
15Granted
35Portfolio score
Filing activity: Apr 5, 2000 → Sep 12, 2008 · 3 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6844550B1 | Multi-beam multi-column electron beam inspection system | Electricity | 116 | Expired |
| US6617587B2 | Electron optics for multi-beam electron beam lithography tool | Electricity | 68 | Expired |
| US6355994B1 | Precision stage | Emerging Cross-Sectional Technologies | 52 | Expired |
| US6977375B2 | Multi-beam multi-column electron beam inspection system | Electricity | 33 | Expired |
| US6734428B2 | Multi-beam multi-column electron beam inspection system | Electricity | 31 | Expired |
| US6943351B2 | Multi-column charged particle optics assembly | Electricity | 28 | Expired |
| US6738506B2 | Image processing system for multi-beam inspection | Physics | 20 | Expired |
| US6872958B2 | Platform positioning system | Emerging Cross-Sectional Technologies | 20 | Expired |
| US7462848B2 | Optics for generation of high current density patterned charged particle beams | Electricity | 19 | Active |
| US7227142B2 | Dual detector optics for simultaneous collection of secondary and backscattered electrons | Electricity | 17 | Expired |
| US7122795B2 | Detector optics for charged particle beam inspection system | Electricity | 16 | Expired |
| US7435956B2 | Apparatus and method for inspection and testing of flat panel display substrates | Electricity | 16 | Expired |
| US7456402B2 | Detector optics for multiple electron beam test system | Electricity | 14 | Active |
| US7786454B2 | Optics for generation of high current density patterned charged particle beams | Electricity | 14 | Active |
| US6471435B1 | Flexural joint | Emerging Cross-Sectional Technologies | 7 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.