Platform positioning system
US6872958B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 28, 2002 |
| Grant date | Mar 29, 2005 |
| Priority date | — |
| Expiry date | Dec 19, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/45
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system for precisely positioning and moving a platform relative to a support structure is disclosed herein. The platform is particularly suitable for carrying wafers. Charged particle optics can be attached to the support structure. The platform positioning system comprises a stage, comprising a base, a platform and stage actuators, the stage actuators being coupled to the platform and the platform being coupled to the base; a frame attached to the base; a support structure mechanically coupled to the frame; stage sensors attached to the support structure, for sensing the position of the platform relative to the support structure; and a current control system coupled to the stage sensors and the stage actuators. The current control system may include a predictor for generating an ouptut signal anticipating the actual position of the platform relative to the support structure in real time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.