Image processing system for multi-beam inspection
US6738506B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2002 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Apr 17, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An image processing system for use in semiconductor wafer inspection comprises a multiplicity of self-contained image processors for independently performing image cross-correlation and defect detection. The system may also comprise an image normalization engine for performing image brightness and contrast normalization. The self-contained image processors and image normalization engine access image data from a memory array; the array is fed data from a multiplicity of imaging modules operating in parallel. The memory array is configured to allow simultaneous access for data input, normalization, and cross-correlation and defect detection. Multiple image processing systems can be configured in parallel as a single image processing computer, all sending defect data to a common display module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.