Noriyoshi Sato
3Patents
0Active
3Granted
25Portfolio score
Filing activity: Jul 28, 1998 → Dec 26, 2003
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7514377B2 | Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device | Electricity | 18 | Expired |
| US6376796B2 | Plasma processing system | Electricity | 5 | Expired |
| US6835279B2 | Plasma generation apparatus | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.