Obsidian, Inc.
8Patents
0Active
8Granted
30Portfolio score
Filing activity: May 18, 1995 → Oct 31, 1997
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5759918A | Method for chemical mechanical polishing | Physics | 135 | Expired |
| US6110025A | Containment ring for substrate carrier apparatus | Performing Operations; Transporting | 79 | Expired |
| US5908530A | Apparatus for chemical mechanical polishing | Physics | 73 | Expired |
| US5899798A | Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing | Performing Operations; Transporting | 52 | Expired |
| US5938884A | Apparatus for chemical mechanical polishing | Physics | 51 | Expired |
| US5851136A | Apparatus for chemical mechanical polishing | Physics | 46 | Expired |
| US6113479A | Wafer carrier for chemical mechanical planarization polishing | Performing Operations; Transporting | 43 | Expired |
| US6196896A | Chemical mechanical polisher | Performing Operations; Transporting | 18 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.