Patent assignee · US · COMPANY

Obsidian, Inc.

8Patents
0Active
8Granted
30Portfolio score

Filing activity: May 18, 1995 → Oct 31, 1997

Most-cited patents

PatentTitleAreaCited byStatus
US5759918A Method for chemical mechanical polishing Physics 135 Expired
US6110025A Containment ring for substrate carrier apparatus Performing Operations; Transporting 79 Expired
US5908530A Apparatus for chemical mechanical polishing Physics 73 Expired
US5899798A Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing Performing Operations; Transporting 52 Expired
US5938884A Apparatus for chemical mechanical polishing Physics 51 Expired
US5851136A Apparatus for chemical mechanical polishing Physics 46 Expired
US6113479A Wafer carrier for chemical mechanical planarization polishing Performing Operations; Transporting 43 Expired
US6196896A Chemical mechanical polisher Performing Operations; Transporting 18 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.